IEC/TC47/SC47F/WG1 Ad hoc meeting held (June 27 and 28, Jeju, South Korea)

MEMS-related standardization is handled by SC47F, one of subcommittees of International Electrotechnical Commission (IEC). Micromachine Center is Secretariat of Japanese National Committee (JNC) of SC47F. Japan, South Korea and China hold SC47F/WG1 Ad hoc meeting every year, taking turns at providing a meeting place. This year, South Korea hosted the meeting in Jeju Island on June 27 and 28. 24 delegates in total (Japan: 9, South Korea: 12, China: 3) attended the meeting. After approval of agenda, discussion on drafts and presentation on future works were done.

1. Discussion on drafts (extraction)
(1) IEC 62047-11: Test method for linear thermal expansion coefficients of MEMS materials (CDV circulation finished)
The comments to the CDV were discussed, and the project leader, Dr. Hak Joo Lee, explained observations to the comments. After discussion, it was decided that this draft should go to the FDIS stage though the formal decision will be done in next SC47F plenary meeting of October.
(2) IEC 62047-17: Bulge test method for measuring mechanical properties of thin films (CD circulation finished)
The comments the CD were discussed and, the project leader, Dr. Yong Hak Huh, explained observations to the comments. For some comments, the conclusions have been put on hold. Final decision will be done in next SC47F plenary meeting of October.
(3) IEC 62047-20: Gyroscopes (CD circulation finished)
The comments to the CD were discussed, and the project leader, Prof. Kuniki Ohwada, explained observations to the comments. After discussion, it was decided that this draft should go to 2nd CD stage.
2. Future works
(1) Prof. Yuji Suzuki explained Japanese future work on "Current Status of MEMS-based Energy Harvesting in Japan". He stated that JNC will submit an NP by the end of December 2012.
(2) Prof. Yoshitada Isono explained Japanese future work on "Indication and Measurement Methods for Micro 3D Trench and Needle Structures". He stated that JN C will submit an NP by the end of March 2013.

3. Next meeting
The next meeting will be held with SC47F plenary meeting of October in Jeju, South Korea.

Abbreviations: -
CD: Committee Draft
CDV: Committee Draft for Vote
FDIS: Final Draft International Standard
NP: New Work Item Proposal
RVN: Report of Voting on NP